CapaciTorr D/Z (UHV)

CapaciTorr® is a product family of flanged NEG vacuum pumps that utilize porous sintered Non-Evaporable Getter (NEG) disks for high-efficiency gas sorption in ultra-clean vacuum systems.

Designed for the Ultra-High Vacuum (UHV) and eXtreme High Vacuum (XHV) pressure regimes (10⁻⁹ Torr and below), the CapaciTorr® range includes two advanced series:

• The CapaciTorr® D Series, based on the well-established St 172 NEG alloy, has been reliably used in UHV/XHV applications such as particle accelerators and scientific instrumentation since the early 1990s

• The CapaciTorr® Z Series employs the innovative ZAO® NEG alloy, specifically developed to provide superior hydrogen pumping speed, enhanced mechanical strength, and reduced outgassing during thermal activation (typically just 1 hour). This advanced alloy also performs significantly better than St 172 when activated at lower temperatures, making it ideal for systems where thermal budget is limited

Notes:

Pumping speed values for water vapor (H₂O) are estimated based on standard testing conditions in ultra-high vacuum (UHV).

Initial pumping speeds are measured in nude configuration, meaning the NEG pump is directly exposed to the vacuum environment without external housing or shielding.

Sorption capacity is calculated based on the point when pumping speed drops to 5% of the initial value under nude conditions.

More than 100 NEG reactivations (sorption cycles) are possible, ensuring long operational life and cost-effective maintenance for demanding UHV/XHV systems.

• Extremely compact NEG pump design with minimal weight
• High and stable pumping speed for all active gases, including H₂, O₂, CO, CO₂, and N₂
• Large sorption capacity and extended operational lifetime for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) environments
• Consistent pumping performance at UHV/XHV pressure levels
• Operates at room temperature without power supply after activation, reducing energy consumption
• Oil-free and vibration-free vacuum pumping, ideal for sensitive instruments
• Reliable operation in strong magnetic fields, such as those found in accelerators and fusion research
• Reversible hydrogen and isotope pumping, enhancing reusability and efficiency

• Extremely compact NEG pump design with minimal weight
• High and stable pumping speed for all active gases, including H₂, O₂, CO, CO₂, and N₂
• Large sorption capacity and extended operational lifetime for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) environments
• Consistent pumping performance at UHV/XHV pressure levels
• Operates at room temperature without power supply after activation, reducing energy consumption
• Oil-free and vibration-free vacuum pumping, ideal for sensitive instruments
• Reliable operation in strong magnetic fields, such as those found in accelerators and fusion research
• Reversible hydrogen and isotope pumping, enhancing reusability and efficiency